Abstract:

Halide perovskites have attracted tremendous interest due to their superior optoelectronic properties, including high absorption coefficients, tunable bandgap, high color purity, and long-ranged balanced electron and hole transport, which makes perovskite materials promising for diverse optoelectronic applications.However, high‐resolution patterning of perovskite arrays is challenging owing to their extreme instability in general photolithography solvents. In this work, a novel patterning process for perovskite arrays is performed, where the high‐resolution, large-scale metal mesh template film is adopted to pattern perovskite arrays through drop casting. This approach is based on photolithography to manufacture a reusable metal mesh template, and the metal mask film can be easily attached to the arbitrary substrate as a mask with the assistance of capillary force and be detached after the coating. Using this approach, we successfully fabricated highly crystalline perovskite micro-disk arrays. The morphological characterization illustrates the excellent fidelity of the perovskite micro-disks to the metal mesh template. This method enables the patterning of perovskite micro-arrays on versatile substrates with reusable metal mesh templates and can be further applied to other materials to facilitate the development of micro-structured optoelectronic devices.